As the focus in materials science shifts towards designing materials at the sub-micron scale - the "nanotechnology" revolution - it becomes increasingly important to characterize the mechanical properties of thin films and small volumes of material. The development of of nanoscale probes and ultrasensitive transducers for force and depth has made such measurements possible. "Nanoindentation" testing is becoming increasingly used in a wide variety of research and manufacturing areas, ranging from the testing of silicon wafers in the electronics industry to the characterization of hard coatings and other surface treatments for cutting tools, dental restoratives and other biomedical implants, and optical components.This book presents a comprehensive and detailed overview of the field of nanoindentation. The underlying theory behind the extraction of elastic modulus, hardness and other properties from the load-displacement data is discussed along with the various systematic and materials-related corrections involved. Also covered are the various methods of testing, details of an international standard for depth-sensing indentation testing, the significance of surface forces and adhesion details of commercially available instruments, and sample applications of the technique. Self-contained, the treatment is aimed at those entering the field, but by bringing together material scattered widely throughout the research literature the book will also be a useful reference for the more experienced researcher.