目次

Introduction to Surface and Thin Film Physics. Definitions. Difference from bulk. Overview—big picture. Surfaces. Crystal structure and chemistry. Surface Dynamics. Surface Thermodynamics. Surface Properties: Electrical, Magnetic, and Optical. Thin Films. Overview of thin film growth. Vacuum and Plasma Environments. Thin Film Deposition: Physical Vapor Deposition. Thin Film Deposition: Chemical Vapor Deposition. Characterization of Surfaces and Thin Films. Characterization: Chemical techniques. Characterization: Optical Techniques. Characterization: Electrical and Magnetic Techniques. Characterization: Mechanical properties.